Conference paper was submitted at ECTC 2023 by CEA-LETI
This paper presents morphological, mechanical and low temperature electrical characterizations of test vehicles comprising evaporated indium microbumps.
Christina Förster
SQA conference 2022: imec presents MATQu related topics
https://sqa-conference.org/SQA-Conference-Guide.pdf
Journal paper submitted to Microelectronic Engineering
A journal paper was submitted to Microelectronic Engineering on developing new cleaning chemistry for resist and fluoropolymer cleaning deposited during the DRIE Bosch process for quantum computing. This chemistry is effective in cleaning the high aspect ratio TSVs verified with…
Journal paper submitted to ECTC 2023
A conference related journal paper was submitted to ECTC 2023 on electroplating of indium on superconducting layers, the growth rate of IMC between indium and SC layers (Nb/In and TiN/In), impact of atmospheric plasma cleaning on surface characteristics of indium…
SQA Conference
The Superconducting Qubits and Algorithms (SQA) Conference took place in August 2022 in Helsinki, Finland.