Project Results

The MATQu project follows a standard work package structure consisting of five technical work packages (WP1 – WP5) enclosed by two non-technical work packages (WP6 and WP7) as can be seen below.

Work Package 1 – Specific High Resistivity and Low defectivity substrates
Work Package 2 – Materials, modules, and processes for superconducting qbits  
Work Package 3 – 3D packaging and bonding 
Work Package 4 – Characterization tools and Benchmarking
Work Package 5 – Simulation and Characterization Demonstrators            
Work Package 6 – Dissemination and Communication      
Work Package 7 – Management               

Deliverables

D2.1 Superconducting materials screening

Lead: IMEC; Achieved Date: 30-Nov-21; WP2

D2.2 Methodology for standardized resonator testing

Lead: IQM; Achieved Date: 28-Feb-22; WP2
Standardized methodology for superconducting resonator testing was proposed across the consortium to enable unambiguous intercomparability across the different testing laboratories. Test resonator designs were created to support the activities by several partners aiming to find improved materials and fabrication processes for quantum computing applications.

D2.3 Tailor-made intelligent fluid formulations for photoresist strippers

Lead: IFC; Achieved Date: 26-Aug-22; WP2

D3.1 The results of identifying the best compatible materials for Qbits

Lead: IMEC; Achieved Date: 3-Jun-22; WP3

D3.2 Plating indium microbumps and pads on blanket, short loop and full loop wafers

Lead: ATOTECH; Achieved Date: 3-Jun-22; WP3

D4.1 Report on Cri/oFlex cabling

Lead: Delft Circuits; Achieved Date: 28-Feb-22; WP4

This report presents the cabling specifications discussed with project partners and summarizes results of prototypes.

D4.4 Specifications of the measurement requirements

Lead: KEYSIGHT; Achieved Date: 30-Nov-21; WP4

D4.7 Identification of the intended applications of the prototype and the necessary adaptations.

Lead:KIURTA GmbH; Achieved Date: 30-Nov-21; WP4
We have identified characterization tasks that could significantly benefit from a rapid test system for cryogenic temperatures and derived the adaptations to the cryostat prototype needed for their implementation. The results of our analysis were summarized in a report.

D6.1 Dissemination Plan Sheet

Lead: Fraunhofer; Achieved Date: 3-Dec-21; WP6

D6.4 Press Release

Lead: Fraunhofer; Achieved Date: 16-Jul-21; WP6

D6.5 Launch of website

Lead: Fraunhofer; Achieved Date: 29-Oct-21; WP6

D7.1 Kick-off meeting

Lead: Fraunhofer; Achieved Date: 30-Jun-21; WP7

D7.2 First year half-term report

Lead: Fraunhofer; Achieved Date: 30-Nov-21; WP7

Achieved Milestones

MS1 MATQu HR SOI wafers

Lead: SOITEC SA; Achieved Date: 3-Jan-22; WP1

MS17 KPI dashboard for resonator testing available

Lead: IQM; Achieved Date: 31-Aug-22; WP2
The consortium-level goals for resonator quality factor and coherence time metrics were consolidated and general instructions on data quality and statistics were created.

MS2 MATQu HR silicon wafers

Lead: SILTRONIC AG; Achieved Date: 22-Apr-22; WP1

MS20 Short loop and full loop wafer preparation and integration flow for indium based micropumps and pads for die to wafer hybrid bonding

Lead: IMEC; Achieved Date: 4-Aug-21; WP3

MS21 Optimization of the Spherolyte In process on coupon-scale to check the compatibility to the substrate and meet the uniformity requirements

Lead: ATOTECH; Achieved Date: 28-Oct-21; WP3

MS22 Optimization of the Spherolyte In process on wafer-scale to meet the uniformity requirements

Lead: ATOTECH; Achieved Date: 6-Jun-22; WP3

MS23 TECH R&D team will screen existing blends and collect references regarding material compatibility, feature undercut, cleaning performance, surface roughening, critical dimension changes

Lead: TECHNIC FRANCE; Achieved Date: 16-Feb-22; WP3

MS24 Optimization of the Spherolyte In process on wafer-scale to prove the compatibility to subsequent CMP and bonding processes

Lead: ATOTECH; Achieved Date: 6-Jun-22; WP3

MS25 Optimization of existing and/or full design of novel approach based on M1 observations

Lead: TECHNIC FRANCE; Achieved Date: 31-May-22; WP3

MS26 Optimize the full process of cleaning, etching and deposition for validation with partners

Lead: TECHNIC FRANCE; Achieved Date: 31-Aug-22; WP3

MS3 Superconductor resonators design available

Lead: IQM; Achieved Date: 28-Feb-22; WP2
Standardized methodology for superconducting resonator testing was proposed across the consortium to enable unambiguous intercomparability across the different testing laboratories. Test resonator designs were created to support the activities by several partners aiming to find improved materials and fabrication processes for quantum computing applications.

MS38 Agreement on device and chip architectures and definition of test plan for devices and data structures for test data storage

Lead: KEYSIGHT; Achieved Date: 31-Jan-22; WP4

MS39 Defined best practices and detailed methodology for multiplexed device testing

Lead: KEYSIGHT; Achieved Date: 31-May-22; WP4

MS4 Baseline resonator process available

Lead: IMEC; Achieved Date: 31-May-22; WP2

MS41 Complete set of Quantify experiment libraries and device drivers for two-qbit characterization developed

Lead: Orange QS; Achieved Date: 22-Mar-22; WP4

MS42 Basic ADR cryostat prototype completed and demonstrated

Lead: KIUTRA GmbH; Achieved Date: 27-Jun-22; WP4
We have completed the assembly of the basic ADR cryostat prototype and reported on its performance.

MS44 Characterization methodology improvements presented

Lead: IQM; Achieved Date: 31-May-22; WP4
Various measurement types and methodologies were assessed to investigate how to best utilize the characterization tool development in MATQu. Resonator and qubit measurements were conducted in conditions emulating the ADR-based rapid turnaround measurement system to validate the compliance in screening measurements.

MS47 Low-level numerical simulations of qbits 1

Lead: ATOTECH; Achieved Date: 31-May-22; WP5

MS49 Physical parameters impacting quantum systems

Lead: KEYSIGHT; Achieved Date: 31-May-22; WP5

MS5 Tailor-made IFs for photoresist stripping and substrate cleaniong available

Lead: IFC; Achieved Date: 25-Aug-22; WP2

MS57 Launch of MATQu project website

Lead: Fraunhofer; Achieved Date: 17-Jun-22; WP6

MS58 First year successful project progress

Lead: Fraunhofer; Achieved Date: 1-Aug-22; WP7

MS7 300mm SIS stacks screened

Lead: IMEC; Achieved Date: 1-Mar-22; WP2

MS8 Short loop 300 mm SIS junction available

Lead: IMEC; Achieved Date: 31-May-22; WP2

MS27 Material and Process optimization: Development and screening of tailor-made intelligent fluids (IFs) for photoresist stripping processes. Provide partners with pre-screened IFs.

Intelligent fluids has developed a highly performant water-based formulation for TSV cleaning. The novel formulation has passed the internal qualification process. First technical scale production of the prototype was produced for delivery of the material to the collaboration partner IMEC. Lead: IFC; Achieved Date: 24-Nov-22; WP3