Conference paper was submitted at ECTC 2023 by CEA-LETI

This paper presents morphological, mechanical and low temperature electrical characterizations of test vehicles comprising evaporated indium microbumps.

This project leading to this application has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 101007322. The JU receives support from the European Union’s Horizon 2020 research and innovation programme and Germany, France, Belgium, Austria, Netherlands, Finland, Israel.